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Small Size MSC400 Magnetron Sputtering Coating Machine Vacuum Coating Unit For College Testing

SHANGHAI VAKIA COATING TECHNOLOGY CO.,LTD.
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Small Size MSC400 Magnetron Sputtering Coating Machine Vacuum Coating Unit For College Testing

Brand Name : VAKIA
Model Number : MSC-400
Certification : ISO2008:9001
Place of Origin : China
MOQ : 1
Price : Negotiable
Payment Terms : T/T, L/C, Cash
Supply Ability : 20 sets/month
Delivery Time : 90 days
Packaging Details : To be packed in new cases/cartons, suitable for long-distance ocean/air and inland transportation.
Equipment Orientation : Vertical
Door Configuration : 1-door
Coating Technology : Magnetron Sputtering Vacuum Coating, PVD Hard Chrome Sputtering
Coating Property : High Reflective and Uniformity, Corrosion proof, Abrasion Resistance
Equipment Features : Robust structure, Compact footprint design, High efficiency and Precision Oepration Control
Operation : Auto/Manually/ Self-Auto/with Touch Screen + PLC System
cavity size : 400*360mm
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small size MSC400 vacuum coating equipment for college testing


1. MSC- Magnetron Sputtering Vacuum Coater


1) film thickness controllability and well repeatability,can be a reliable system of pre-plated thickness of the films and sputtering in a larger surface of uniform film;

2) The adhesion of the film and the substrate is very well. Some of the high energy of sputtered atoms to produce different levels of injection phenomenon, pseudo-diffusion layer formed on the substrate layer of sputtered atoms and substrate atoms fused with each other;

3) Preparation of special material of the film, you can use different materials and sputtering hybrid film, compound film,also can be sputtered into the TiN imitation gold film.


2. Main Technical Parameters


Model and Main Technical Parameters of VAKIA-MSC Series Vacuum Magnetron Sputtering Coating Machine

Performance

/Model

VAKIA-MSC -700

VAKIA-MSC -900

VAKIA-MSC -1000

VAKIA-MSC -1250

VAKIA-MSC -1400

VAKIA-MSC -1600

Size of coating chamber

700*H900mm

900*H1100mm

1000*H1200mm

1250*H1350mm

1400*H1600mm

1600*H1800mm

Power supply type

Filament power supply, pulse bias power supply, DC magnetron power supply, intermediate frequency magnetron power supply, radio frequency magnetron power supply, linear ionization source

Structure of vacuum chamber

Vertical double door, vertical front door structure, rear air exhaust system

Material of vacuum chamber

High-quality stainless steel cavity

Limit vacuum

6.0*10-4Pa

Pump-down time (no-load)

Pump the atmosphere to 8.0*10-3>Pa ≤15 minutes

Vacuum acquisition system

Diffusion pump or molecular pump + Roots pump + Mechanical pump + rotary vane pump (the specific model can be configured according to customer requirements)

Coating mode

Magnetron sputtering coating

Film type

Metal film, reactive film, compound film, multilayer film and semiconductor film

Magnetron target type

Rectangular magnetron target, cylindrical magnetron target and twin magnetron targets

Magnetron supply power and number of magnetron targets

Select according to different coating process and customer requirements

Bias power supply

10KW/1 unit

20KW/1 unit

20KW/1 unit

30KW/1 unit

40KW/1 unit

50KW/1unit

Rotating mode of workpiece turntable

Planetary revolution and autorotation, variable frequency speed regulation (controllable and adjustable)

Process gas

3-path or 4-path process gas flow control and display system, selective automatic gassing system

Cooling mode

Water circulation cooling mode, cooling water tower or industrial water cooler or deep cooling system. (Provided by customers)

Control mode

Manual/automatic integration mode, touch screen operation, PLC or computer control

Total power

30KW

35KW

40KW

50KW

65KW

80KW

Alarm and protection

Alarm water shortage, overcurrent and over-voltage, open circuit and other abnormal conditions of pumps, targets and so on and execute relevant protective measures and electric interlock function

Equipment area

W2m*L3m

W2.5m*L3.5m

W3m*L4m

W4m*L5m

W4.5m*L6m

W5m*L7m

Other technical parameters

Water Pressure ≥0.2MPa, Water Temperature ≤25°C, Air Pressure: 0.5-0.8MPa

Remarks

The specific configuration of coating equipment can be designed according to process requirements of coating products



Product Tags:

Hard Chrome Plating Machine

      

TiN Coating Equipment

      
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