Precision optical PVD vacuum coating machine / system / equipment /
- The crystalline diaphragm thickness monitoring,Coating process is
full automatic control;
- Configure the foreign ion source,to ensure uniformity, stability of
the film thickness, plating 60 to 70 layers of high quality optical
- Other device select the best of domestic,Not only ensure reliable
coating production, at the same time, the machine can achieve the
optimal performance; Provide good products to our customers at low
- Can provide to customers a one-time need high-grade optical film
formulation process, ( film layer number more than 100, which some
famous foreign counterparts can't provide), pull testing
machine/process before the equipment ex-works delivery；
- Spectrophotometer was applied to substrate in multiple locations,
put standard substrate for coating test and analysis, the
uniformity of the heating oven, ion source and ion bombardment
uniformity, fixed plate shape, such as fine optimization, ensure
the best effect equipment.
1. Our engineers are ready to provide custom made design and
recommendation for each customer's case.
2. We provide professional consulting service for PVD coaters and
3. We also have set up good relations with the suppliers of
relative consumables and parts for your needs
1. We will send the engineers to your place for installation, fine
tune and for operation training.
2. We will provide troubleshooting service all lifetime.
3. The warranty period of the machine is 1 year.
4. We will contact you to ask for about the conditions of the
machine in periodically.
5. We also provide the service for further extension on your
|application||Plating system for multilayer film, antireflection film, lens
coating ,cut off /band pass filter, reflective film, anti-fouling
membrane and so on.|
|Principal dimension||Inside the chamber||φ900×1300||φ1100×1520||φ1300×1610||φ1550×1800||φ1800×1920||φ2350×1400|
|Substrate umbrella stand||φ790||φ950||φ1130||φ1400||φ1600||φ2200|
|Umbrella stand rotary speed||0~30r/min,continuously adjustable|
|Major parameter||Vacuumizing speed||From one bar to 5.0×10-3Pa＜15 minutes|
|Exhaust system||Exhaust vacuum pumps||22IN oil diffusion pump system||22IN oil diffusion pump system||28IN oil diffusion pump system||28IN oil diffusion pump system||28IN oil diffusion pump system||28IN oil diffusion pump system|
|Cryogenic trap||Selective assembly|
|Heating system||Heating method||Up heating mode (under heating),heating plate adjust the heating
power regional ,PID control|
|Crystalline diaphragm thickness gauge||XTC-3(or IC-5)|
|Vacuum gauge||thermocouple+thermionic cathode (Domestic)|
|The pressure controller||With a pressure control valve|
|Ion source||Import ion source|
|Electronic gun||Configuration import electron gun, single gun, reserve double the
number of the gun|
|Resistance type evaporation||5KW, electrode with water|